- 专利标题: STACKED FORKSHEET TRANSISTORS
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申请号: US18614290申请日: 2024-03-22
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公开(公告)号: US20240234422A1公开(公告)日: 2024-07-11
- 发明人: Cheng-Ying HUANG , Gilbert DEWEY , Anh PHAN , Nicole K. THOMAS , Urusa ALAAN , Seung Hoon SUNG , Christopher M. NEUMANN , Willy RACHMADY , Patrick MORROW , Hui Jae YOO , Richard E. SCHENKER , Marko RADOSAVLJEVIC , Jack T. KAVALIEROS , Ehren MANNEBACH
- 申请人: Intel Corporation
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 主分类号: H01L27/092
- IPC分类号: H01L27/092 ; H01L29/06 ; H01L29/423 ; H01L29/775 ; H01L29/78 ; H10B12/00
摘要:
Embodiments disclosed herein include stacked forksheet transistor devices, and methods of fabricating stacked forksheet transistor devices. In an example, an integrated circuit structure includes a backbone. A first transistor device includes a first vertical stack of semiconductor channels adjacent to an edge of the backbone. A second transistor device includes a second vertical stack of semiconductor channels adjacent to the edge of the backbone. The second transistor device is stacked on the first transistor device.
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