- 专利标题: BONDING THROUGH MULTI-SHOT LASER REFLOW
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申请号: US18613954申请日: 2024-03-22
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公开(公告)号: US20240234365A1公开(公告)日: 2024-07-11
- 发明人: Wei-Yu Chen , Chia-Shen Cheng , Hao-Jan Pei , Philip Yu-Shuan Chung , Kuei-Wei Huang , Yu-Peng Tsai , Hsiu-Jen Lin , Ching-Hua Hsieh , Chen-Hua Yu , Chung-Shi Liu
- 申请人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsinchu
- 分案原申请号: US16121888 2018.09.05
- 主分类号: H01L23/00
- IPC分类号: H01L23/00 ; H01L21/56 ; H01L23/31 ; H01L23/498
摘要:
A method includes performing a first laser shot on a first portion of a top surface of a first package component. The first package component is over a second package component, and a first solder region between the first package component and the second package component is reflowed by the first laser shot. After the first laser shot, a second laser shot is performed on a second portion of the top surface of the first package component. A second solder region between the first package component and the second package component is reflowed by the second laser shot.
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