Invention Publication
- Patent Title: Semiconductor Device and Method of Forming RDL with Graphene-Coated Core
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Application No.: US18150567Application Date: 2023-01-05
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Publication No.: US20240234291A1Publication Date: 2024-07-11
- Inventor: YongMoo Shin , HyunSeok Park , KyoWang Koo , Sinjae Kim
- Applicant: STATS ChipPAC Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: STATS ChipPAC Pte. Ltd.
- Current Assignee: STATS ChipPAC Pte. Ltd.
- Current Assignee Address: SG Singapore
- Main IPC: H01L23/498
- IPC: H01L23/498 ; H01L21/48 ; H01L25/16

Abstract:
A semiconductor device has a one-layer interconnect substrate and electrical component disposed over a first surface of the interconnect substrate. The electrical components can be discrete electrical devices, IPDs, semiconductor die, semiconductor packages, surface mount devices, and RF components. An RDL with a graphene core shell is formed over a second surface of the interconnect substrate. The graphene core shell has a copper core and a graphene coating formed over the copper core. The RDL further has a matrix to embed the graphene core shell. The graphene core shells through RDL form an electrical path. The RDL can be thermoset material or polymer or composite epoxy type matrix. The graphene core shell is embedded within the thermoset material or polymer or composite epoxy type matrix. The RDL with graphene core shell is useful for electrical conductivity and electrical interconnect within an SIP.
Information query
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