- 专利标题: LARGE-AREA III-V SEMICONDUCTOR LAYER TRANSFERRING METHOD
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申请号: US18488718申请日: 2023-10-17
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公开(公告)号: US20240213085A1公开(公告)日: 2024-06-27
- 发明人: Ho Sung KIM , Daemyeong GEUM
- 申请人: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- 申请人地址: KR Daejeon
- 专利权人: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- 当前专利权人: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- 当前专利权人地址: KR Daejeon
- 优先权: KR 20220183580 2022.12.23
- 主分类号: H01L21/762
- IPC分类号: H01L21/762 ; H01L21/02
摘要:
Disclosed is a large-area III-V semiconductor layer transferring method. The large-area III-V semiconductor layer transferring method includes: forming III-V semiconductor dies on a lower substrate; forming dielectric patterns on the III-V semiconductor dies and the lower substrate exposed between the III-V semiconductor dies; forming a lower III-V semiconductor layer on the dielectric patterns and the III-V semiconductor dies; forming a sacrificial layer on the lower III-V semiconductor layer; forming an upper III-V semiconductor layer on the sacrificial layer; bonding an upper substrate onto the III-V semiconductor layer; and removing the sacrificial layer.
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