- 专利标题: Apparatus and Method for Fabrication of Shield Plate
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申请号: US18536792申请日: 2023-12-12
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公开(公告)号: US20240208762A1公开(公告)日: 2024-06-27
- 发明人: Tsutomu Negishi , Munehiro Kozuka
- 申请人: JEOL Ltd.
- 申请人地址: JP Tokyo
- 专利权人: JEOL Ltd.
- 当前专利权人: JEOL Ltd.
- 当前专利权人地址: JP Tokyo
- 优先权: JP 22208823 2022.12.26
- 主分类号: B65H35/00
- IPC分类号: B65H35/00 ; B65H59/06 ; H01J37/09
摘要:
There is provided a shield plate fabrication apparatus capable of fabricating a shield plate easily. The shield plate is included in a sample milling apparatus which mills a sample by shielding a part of the sample with the shield plate and irradiating the sample with a charged particle beam. The fabrication apparatus includes: a base plate holding shaft for rotatably holding a base plate and winding tape around the base plate; and a tension mechanism for applying tension to the tape while it is being wound around the base plate.
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