- 专利标题: BUMPLESS HYBRID ORGANIC GLASS INTERPOSER
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申请号: US17988051申请日: 2022-11-16
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公开(公告)号: US20240162157A1公开(公告)日: 2024-05-16
- 发明人: Jeremy D. Ecton , Brandon Christian Marin , Aleksandar Aleksov , Srinivas V. Pietambaram , Haobo Chen
- 申请人: Intel Corporation
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 主分类号: H01L23/538
- IPC分类号: H01L23/538 ; H01L21/48 ; H01L23/15 ; H01L23/498
摘要:
A bumpless hybrid organic glass interposer. One or more high density pattern (HDP) routing layers are placed on a functional, thin, carrier, separate from the intended organic substrate patch or package. The HDP layer(s) is/are then attached to the substrate package. The interposers achieve electrical connections between the HDP layer and underlying routing layer of the substrate package by utilizing a self-align dry etch process through landing pads connected to the HDP routing.
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