Invention Publication
- Patent Title: SEMICONDUCTOR CHARGED PARTICLE DETECTOR FOR MICROSCOPY
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Application No.: US18038206Application Date: 2021-10-26
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Publication No.: US20240096589A1Publication Date: 2024-03-21
- Inventor: Stoyan NIHTIANOV , Kenichi KANAI , Padmakumar RAMACHANDRA RAO
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- International Application: PCT/EP2021/079725 2021.10.26
- Date entered country: 2023-05-22
- Main IPC: H01J37/244
- IPC: H01J37/244
Abstract:
A detector may be provided for a charged particle apparatus comprising:
a sensing element including a diode; and
a circuit configured to detect an electron event caused by an electron impacting the sensing element,
wherein the circuit comprises a voltage monitoring device and a reset device,
wherein the reset device is configured to regularly reset the diode by setting a voltage across the diode to a predetermined value,
and wherein the voltage monitoring device is connected to the diode to monitor a voltage across the diode in between resets.
a sensing element including a diode; and
a circuit configured to detect an electron event caused by an electron impacting the sensing element,
wherein the circuit comprises a voltage monitoring device and a reset device,
wherein the reset device is configured to regularly reset the diode by setting a voltage across the diode to a predetermined value,
and wherein the voltage monitoring device is connected to the diode to monitor a voltage across the diode in between resets.
Information query
