- 专利标题: DETECTION DEVICE AND DETECTION METHOD
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申请号: US18237971申请日: 2023-08-25
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公开(公告)号: US20240068805A1公开(公告)日: 2024-02-29
- 发明人: ARATA NAGANUMA
- 申请人: LAPIS SEMICONDUCTOR CO., LTD.
- 申请人地址: JP Kanagawa
- 专利权人: LAPIS SEMICONDUCTOR CO., LTD.
- 当前专利权人: LAPIS SEMICONDUCTOR CO., LTD.
- 当前专利权人地址: JP Kanagawa
- 优先权: JP 22136758 2022.08.30
- 主分类号: G01B11/27
- IPC分类号: G01B11/27
摘要:
A detection device including: a laser sensor provided between a supply unit that supplies an inspection object and an inspection unit that inspects the inspection object; and a measurement unit that measures a state of the inspection object by using the laser sensor with respect to the inspection object moving along a transport direction from the supply unit toward the inspection unit.
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