Invention Publication
- Patent Title: Two Dimensional Rod Resonator for RF Filtering
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Application No.: US18378254Application Date: 2023-10-10
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Publication No.: US20240039504A1Publication Date: 2024-02-01
- Inventor: Cristian CASSELLA , Xuanyi ZHAO
- Applicant: Northeastern University
- Applicant Address: US MA Boston
- Assignee: Northeastern University
- Current Assignee: Northeastern University
- Current Assignee Address: US MA Boston
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H3/04 ; H03H9/17 ; H03H9/56 ; H03H9/13

Abstract:
A microelectromechanical resonator device is provided having two-dimensional resonant rods. The resonator device has a piezoelectric layer formed with a plurality of alternating rods and trenches. A bottom electrode is in contact with a bottom surface of the piezoelectric layer. A top electrode metal grating of conductive strips is aligned in contact with corresponding rods of the piezoelectric layer.
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