• 专利标题: METHOD OF ESTIMATING OXYGEN CONCENTRATION IN SILICON SINGLE CRYSTAL, METHOD OF MANUFACTURING SILICON SINGLE CRYSTAL, AND SILICON SINGLE CRYSTAL MANUFACTURING APPARATAUS
  • 申请号: US18036988
    申请日: 2021-12-06
  • 公开(公告)号: US20240019397A1
    公开(公告)日: 2024-01-18
  • 发明人: Ippei SHIMOZAKIKeiichi TAKANASHI
  • 申请人: SUMCO Corporation
  • 申请人地址: JP Tokyo
  • 专利权人: SUMCO Corporation
  • 当前专利权人: SUMCO Corporation
  • 当前专利权人地址: JP Tokyo
  • 优先权: JP 20203240 2020.12.08
  • 国际申请: PCT/JP2021/044675 2021.12.06
  • 进入国家日期: 2023-05-15
  • 主分类号: G01N27/74
  • IPC分类号: G01N27/74 C30B29/06 C30B15/22
METHOD OF ESTIMATING OXYGEN CONCENTRATION IN SILICON SINGLE CRYSTAL, METHOD OF MANUFACTURING SILICON SINGLE CRYSTAL, AND SILICON SINGLE CRYSTAL MANUFACTURING APPARATAUS
摘要:
To provide a method of estimating an oxygen concentration in a silicon single crystal, a method of manufacturing a silicon single crystal, and a silicon single crystal manufacturing apparatus capable of manufacturing silicon single crystals having constant quality by preventing polarization of the oxygen concentration in the silicon single crystal. A method of estimating an oxygen concentration in a silicon single crystal according to the present invention is provided with measuring a height (gap) of a melt surface of a silicon melt in a quartz crucible when pulling up a silicon single crystal while applying a lateral magnetic field to the silicon melt and estimating an oxygen concentration in the silicon single crystal from a minute variation in the height of the melt surface.
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