- 专利标题: METHOD OF ESTIMATING OXYGEN CONCENTRATION IN SILICON SINGLE CRYSTAL, METHOD OF MANUFACTURING SILICON SINGLE CRYSTAL, AND SILICON SINGLE CRYSTAL MANUFACTURING APPARATAUS
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申请号: US18036988申请日: 2021-12-06
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公开(公告)号: US20240019397A1公开(公告)日: 2024-01-18
- 发明人: Ippei SHIMOZAKI , Keiichi TAKANASHI
- 申请人: SUMCO Corporation
- 申请人地址: JP Tokyo
- 专利权人: SUMCO Corporation
- 当前专利权人: SUMCO Corporation
- 当前专利权人地址: JP Tokyo
- 优先权: JP 20203240 2020.12.08
- 国际申请: PCT/JP2021/044675 2021.12.06
- 进入国家日期: 2023-05-15
- 主分类号: G01N27/74
- IPC分类号: G01N27/74 ; C30B29/06 ; C30B15/22
摘要:
To provide a method of estimating an oxygen concentration in a silicon single crystal, a method of manufacturing a silicon single crystal, and a silicon single crystal manufacturing apparatus capable of manufacturing silicon single crystals having constant quality by preventing polarization of the oxygen concentration in the silicon single crystal. A method of estimating an oxygen concentration in a silicon single crystal according to the present invention is provided with measuring a height (gap) of a melt surface of a silicon melt in a quartz crucible when pulling up a silicon single crystal while applying a lateral magnetic field to the silicon melt and estimating an oxygen concentration in the silicon single crystal from a minute variation in the height of the melt surface.
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