发明公开
- 专利标题: VERTICAL MEMORY DEVICES
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申请号: US18370543申请日: 2023-09-20
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公开(公告)号: US20240015968A1公开(公告)日: 2024-01-11
- 发明人: Kohji KANAMORI , Shinhwan KANG
- 申请人: SAMSUNG ELECTRONICS CO., LTD.
- 申请人地址: KR Suwon-si
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址: KR Suwon-si
- 优先权: KR 20190131640 2019.10.22
- 分案原申请号: US17705513 2022.03.28
- 主分类号: H10B43/27
- IPC分类号: H10B43/27 ; H01L23/522 ; H01L23/528 ; H01L21/02 ; H01L21/311 ; H01L21/28 ; H10B43/10 ; H10B43/40 ; H10B43/50
摘要:
A vertical memory device including gate electrodes on a substrate, the gate electrodes being spaced apart in a first direction and stacked in a staircase arrangement; a channel extending through the gate electrodes in the first direction; a first contact plug extending through a pad of a first gate electrode to contact an upper surface of the first gate electrode, the first contact plug extending through a portion of a second gate electrode, and the second gate electrode being adjacent to the first gate electrode; a first spacer between the first contact plug and sidewalls of the first gate electrode and the second gate electrode facing the first contact plug, the first spacer electrically insulating the first contact plug from the second gate electrode; and a first burying pattern contacting bottom surfaces of the first contact plug and the first spacer, the first burying pattern including an insulating material.
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