Invention Publication
- Patent Title: SUSTAINABILITY MONITORING PLATFORM WITH SENSOR SUPPORT
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Application No.: US17981305Application Date: 2022-11-04
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Publication No.: US20240012393A1Publication Date: 2024-01-11
- Inventor: Ala Moradian , Aleksey Yanovich , Orlando Trejo , Elizabeth Neville , Dinesh Saigal , Umesh Madhav Kelkar
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: G05B19/4065
- IPC: G05B19/4065

Abstract:
In embodiments, a method includes receiving, by a processing device, first sensor data generated by a plurality of sensors of a process chamber of a manufacturing system during execution of a fabrication process. The method includes receiving, by the processing device, second sensor data generated by one or more external sensors that are not components of the process chamber during execution of the fabrication process. The method includes determining, by the processing device, environmental resource usage data indicative of an environmental resource consumption of the fabrication process run on the process chamber based on the first sensor data and the second sensor data. The method includes providing, by the processing device, the environmental resource usage data for display on a graphical user interface (GUI).
Information query
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