Invention Application
- Patent Title: MICRO-ELECTRO-MECHANICAL DEVICE FOR TRANSDUCING HIGH-FREQUENCY ACOUSTIC WAVES IN A PROPAGATION MEDIUM AND MANUFACTURING PROCESS THEREOF
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Application No.: US17966344Application Date: 2022-10-14
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Publication No.: US20230129720A1Publication Date: 2023-04-27
- Inventor: Domenico GIUSTI , Fabio QUAGLIA , Carlo Luigi PRELINI
- Applicant: STMICROELECTRONICS S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.r.l.
- Current Assignee: STMICROELECTRONICS S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Priority: IT102021000027425 20211026
- Main IPC: B81B3/00
- IPC: B81B3/00 ; B81C1/00 ; H10N30/87 ; H10N30/20

Abstract:
PMUT acoustic transducer formed in a body of semiconductor material having a face and accommodating a plurality of first buried cavities, having an annular shape, arranged concentrically with each other and extending at a distance from the face of the body. The first buried cavities delimit from below a plurality of first membranes formed by the body so that each first membrane extends between a respective first buried cavity of the plurality of first buried cavities and the face of the body. A plurality of piezoelectric elements extend on the face of the body, each piezoelectric element extending above a respective first membrane of the plurality of first membranes. The first membranes have different widths, variable between a minimum value and a maximum value.
Information query