- 专利标题: SIMULATION APPARATUS AND STORAGE MEDIUM
-
申请号: US18329669申请日: 2023-06-06
-
公开(公告)号: US20230409779A1公开(公告)日: 2023-12-21
- 发明人: KEN KATSUTA , YUICHIRO OGUCHI
- 申请人: CANON KABUSHIKI KAISHA
- 申请人地址: JP Tokyo
- 专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人地址: JP Tokyo
- 优先权: JP 22099046 2022.06.20
- 主分类号: G06F30/20
- IPC分类号: G06F30/20
摘要:
A simulation apparatus that predicts a behavior of a curable composition in a film forming process includes a processor configured to execute behavior computation of the curable composition by a computational method selected from a first computational method and a second computational method which shortens a computation time as compared to the first computational method. The processor is configured to execute behavior computation of the curable composition by the second computational method while applying each of a plurality of tentative parameter sets for the film forming process, decide, from the plurality of tentative parameter sets, a parameter set that produces a result of the behavior computation satisfying a predetermined criterion for evaluation, and execute behavior computation of the curable composition by the first computational method while applying the decided parameter set.
信息查询