Invention Publication
- Patent Title: HIGH CAPACITANCE MIM DEVICE WITH SELF ALIGNED SPACER
-
Application No.: US18360941Application Date: 2023-07-28
-
Publication No.: US20230369389A1Publication Date: 2023-11-16
- Inventor: Ching-Sheng Chu , Dun-Nian Yaung , Yu-Cheng Tsai , Meng-Hsien Lin , Ching-Chung Su , Jen-Cheng Liu , Wen-De Wang , Guan-Hua Chen
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- The original application number of the division: US17308381 2021.05.05
- Main IPC: H01L21/20
- IPC: H01L21/20 ; H01L29/94 ; H01L29/66

Abstract:
The present disclosure, in some embodiments, relates to a metal-insulator-metal (MIM) capacitor structure. The MIM capacitor structure includes one or more lower interconnects disposed within a lower dielectric structure over a substrate. A first dielectric layer is over the lower dielectric structure and includes sidewalls defining a plurality of openings extending through the first dielectric layer. A lower electrode is arranged along the sidewalls and over an upper surface of the first dielectric layer, a capacitor dielectric is arranged along sidewalls and an upper surface of the lower electrode, and an upper electrode is arranged along sidewalls and an upper surface of the capacitor dielectric. A spacer is along opposing outermost sidewalls of the upper electrode. The spacer has an outermost surface extending from a lowermost surface of the spacer to a top of the spacer. The outermost surface is substantially aligned with an outermost sidewall of the lower electrode.
Public/Granted literature
- US12154939B2 High capacitance MIM device with self aligned spacer Public/Granted day:2024-11-26
Information query
IPC分类: