Invention Publication
- Patent Title: CONNECTION SCHEME WITH BACKSIDE POWER DISTRIBUTION NETWORK
-
Application No.: US17853867Application Date: 2022-06-29
-
Publication No.: US20230352407A1Publication Date: 2023-11-02
- Inventor: Saehan Park , Seungyoung Lee , Kang-ill Seo
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Main IPC: H01L23/498
- IPC: H01L23/498 ; H01L23/528 ; H01L23/535 ; H01L21/8238 ; H01L21/768

Abstract:
Provided is a system for routing connections to a logic circuit, the system including a first wafer having a backside and a frontside opposite the backside, a power conductor at the backside of the first wafer, a core at the frontside of the first wafer, a power via electrically connected to the power conductor and to the core, a signal pad at the backside of the first wafer, a first frontside signal-routing metal at the frontside of the first wafer, and a signal via connected to the signal pad and the first frontside signal-routing metal.
Information query
IPC分类: