Invention Publication
- Patent Title: SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
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Application No.: US17743459Application Date: 2022-05-13
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Publication No.: US20230337551A1Publication Date: 2023-10-19
- Inventor: Jia-Rong Wu , Chi-Hsuan Cheng , Rai-Min Huang , Po-Kai Hsu
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu City
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu City
- Priority: CN 2210397417.0 2022.04.15
- Main IPC: H01L43/14
- IPC: H01L43/14 ; H01L27/22 ; H01L43/04 ; H01L43/06

Abstract:
A method for fabricating semiconductor device includes the steps of first forming a magnetic tunneling junction (MTJ) on a substrate, forming a first spin orbit torque (SOT) layer on the MTJ, forming an inter-metal dielectric (IMD) layer around the first SOT layer, forming a second SOT layer on the IMD layer, forming a first hard mask on the second SOT layer, patterning the first hard mask along a first direction, and then patterning the first hard mask along a second direction.
Information query
IPC分类: