发明公开
- 专利标题: IMAGE SENSOR
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申请号: US17716079申请日: 2022-04-08
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公开(公告)号: US20230326942A1公开(公告)日: 2023-10-12
- 发明人: Chun-Yuan WANG , Zong-Ru TU , Yu-Chi CHANG , Han-Lin WU , Hung-Jen TSAI
- 申请人: VisEra Technologies Company Limited
- 申请人地址: TW Hsin-Chu City
- 专利权人: VisEra Technologies Company Limited
- 当前专利权人: VisEra Technologies Company Limited
- 当前专利权人地址: TW Hsin-Chu City
- 主分类号: H01L27/146
- IPC分类号: H01L27/146
摘要:
An image sensor includes a sensor unit, a sensing portion disposed within the sensor unit, and an isolation structure corresponding to the sensing portion. The isolation structure includes a first deep trench isolation (DTI) structure surrounding the sensor unit from top view, and a second deep trench isolation structure laterally enclosed by the first deep trench isolation structure. The second deep trench isolation structure is located close to a corner of the sensor unit defined by the first deep trench isolation structure. The second deep trench isolation structure is asymmetrical with respect to a horizontal middle line or a vertical middle line within the sensor unit.
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