- 专利标题: DRY VACUUM PUMP AND MANUFACTURING METHOD
-
申请号: US17768071申请日: 2020-09-24
-
公开(公告)号: US20230323878A1公开(公告)日: 2023-10-12
- 发明人: Laetitia POPIN , Philippe D'HARBOULLE , Igor FORESTIER , Sebastien BARDEL , Emmanuel BEAUJON
- 申请人: PFEIFFER VACUUM
- 申请人地址: FR Annecy
- 专利权人: PFEIFFER VACUUM
- 当前专利权人: PFEIFFER VACUUM
- 当前专利权人地址: FR Annecy
- 优先权: FR 1911370 2019.10.14
- 国际申请: PCT/EP2020/076797 2020.09.24
- 进入国家日期: 2022-04-11
- 主分类号: F04C25/02
- IPC分类号: F04C25/02 ; F04C18/12
摘要:
A dry vacuum pump has a stator (2) and two rotors (5) that are accommodated in at least one compression chamber (3) of the stator (2), the rotors (5) being configured to rotate synchronously in opposite directions so as to drive a gas to be pumped between an intake and a delivery of the vacuum pump. The rotors (5) and the compression chamber (3) of the stator (2) are coated with a nickel-phosphorus coating (11) comprising between 9% and 14% phosphorus and having a thickness greater than 20 μm, the nickel-phosphorus coating (11) having undergone a hardening heat treatment comprising a step of heating to a treatment temperature greater than 250° C. for a treatment duration greater than one hour, so as to have a hardness greater than 700 HV.
信息查询