- 专利标题: LIGHT DETECTION MODULE AND BEAT SPECTROMETER
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申请号: US18023435申请日: 2021-05-26
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公开(公告)号: US20230317867A1公开(公告)日: 2023-10-05
- 发明人: Tatsuo DOUGAKIUCHI , Akio ITO , Masahiro HITAKA , Tadataka EDAMURA
- 申请人: HAMAMATSU PHOTONICS K.K.
- 申请人地址: JP Hamamatsu-shi, Shizuoka
- 专利权人: HAMAMATSU PHOTONICS K.K.
- 当前专利权人: HAMAMATSU PHOTONICS K.K.
- 当前专利权人地址: JP Hamamatsu-shi, Shizuoka
- 优先权: JP 20155515 2020.09.16
- 国际申请: PCT/JP2021/020057 2021.05.26
- 进入国家日期: 2023-02-27
- 主分类号: H01L31/0352
- IPC分类号: H01L31/0352 ; H01L23/482 ; H01L31/02 ; H01L31/0232 ; H01L31/0304 ; G01J3/10 ; G01J3/45 ; G01J3/457
摘要:
A photodetection module includes a photodetector and a fixing member. The photodetector includes a semiconductor substrate, a mesa portion, a first contact layer, a second contact layer, and a first electrode formed in a planar shape on a major surface of the semiconductor substrate, and electrically connected to one of the first contact layer and the second contact layer. The fixing member includes an insulating substrate, and a first wiring formed in a planar shape on a major surface of the insulating substrate. A recessed portion is formed in the major surface of the insulating substrate, and at least a part of the mesa portion is disposed inside the recessed portion. The first electrode is electrically connected to the first wiring in a state where the first electrode is in surface contact with the first wiring.
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