Invention Publication
- Patent Title: DIAGNOSTIC DISC WITH A HIGH VACUUM AND TEMPERATURE TOLERANT POWER SOURCE
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Application No.: US18109660Application Date: 2023-02-14
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Publication No.: US20230199992A1Publication Date: 2023-06-22
- Inventor: Phillip A. Criminale , Zhiqiang Guo , Philip A. Kraus , Andrew Myles , Martin Perez-Guzman
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- The original application number of the division: US16890013 2020.06.02
- Main IPC: H05K5/06
- IPC: H05K5/06 ; H05K1/18 ; H05K5/03 ; H05K7/14

Abstract:
A method includes establishing, by a diagnostic disc, a secure wireless connection with a computing system using a wireless communication circuit of the diagnostic disc before or after the diagnostic disc is placed into a processing chamber. The method further includes generating, at a vacuum of about 0.1 mTorr to about 50 mTorr and a temperature of about −20° C. to about 120° C., by at least one non-contact sensor of the diagnostic disc, sensor data of a component disposed within the processing chamber. The method further includes wirelessly transmitting the sensor data to the computing system via the secure wireless connection using the wireless communication circuit. The diagnostic disc includes a disc-shaped body, a printed circuit board (PCB), a power source coupled to the PCB, a casing that encapsulates the power source, and a cover positioned over the PCB and the power source.
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