- 专利标题: MEMORY CELL IN WAFER BACKSIDE
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申请号: US17551457申请日: 2021-12-15
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公开(公告)号: US20230187314A1公开(公告)日: 2023-06-15
- 发明人: Biswanath Senapati , Seiji Munetoh , Nicholas Anthony Lanzillo , Lawrence A. Clevenger , Geoffrey Burr , Kohji Hosokawa
- 申请人: International Business Machines Corporation
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L23/48
- IPC分类号: H01L23/48 ; H01L27/24 ; H01L23/532 ; H01L21/768 ; G11C13/00
摘要:
A memory cell in a backside of a wafer and methods of forming the memory cell are described. A buried metal structure can be formed through a frontside of a substrate. At least one device can be formed on the frontside of a substrate, where the at least one device can be connected to the buried metal structure in the substrate. A through silicon via (TSV) can be formed through a backside of the substrate, where the TSV can be connected to the buried metal structure. A memory cell can be formed on the backside of the substrate, where the memory cell can be connected to the TSV.
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