- 专利标题: CHARGED PARTICLE BEAM GENERATION
-
申请号: US18061338申请日: 2022-12-02
-
公开(公告)号: US20230178326A1公开(公告)日: 2023-06-08
- 发明人: Hyunwook Park , Nakri Dao , Kim Richard Overstreet
- 申请人: Microchip Technology Incorporated
- 申请人地址: US AZ Chandler
- 专利权人: Microchip Technology Incorporated
- 当前专利权人: Microchip Technology Incorporated
- 当前专利权人地址: US AZ Chandler
- 主分类号: H01J37/147
- IPC分类号: H01J37/147 ; H01J37/24
摘要:
One or more examples relate, generally, to an apparatus. The apparatus includes a charged particle source and a charged particle pointer. The charged particle pointer urges charged particles emitted by the charged particle source in a predetermined direction. The charged particle pointer comprises a repeller, and an isolator positioned along a path extending from the repeller in the predetermined direction.
信息查询