Invention Publication
- Patent Title: DISPLAY APPARATUS AND METHOD OF MANUFACTURING THE SAME
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Application No.: US17939360Application Date: 2022-09-07
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Publication No.: US20230172040A1Publication Date: 2023-06-01
- Inventor: Yungbin Chung , Eunjin Kwak , Jihye Han , Chulmin Bae , Sangwook Lee
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Priority: KR 20210167722 2021.11.29
- Main IPC: H01L51/00
- IPC: H01L51/00 ; H01L27/32 ; H01L51/56 ; C23C16/40 ; C23C16/50

Abstract:
Provided are a display apparatus, which may be easily separated from a carrier substrate, and a method of manufacturing the same. The method of manufacturing a display apparatus includes: forming, on a carrier substrate, a first inorganic layer including silicon oxide; plasma-treating the first inorganic layer by using nitrous oxide gas; after the plasma-treating, forming a display substrate on the first inorganic layer; forming a display element layer above the display substrate; and separating the display substrate from the carrier substrate.
Information query
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