Invention Publication
- Patent Title: MODELLING AND PREDICTION SYSTEM WITH AUTO MACHINE LEARNING IN THE PRODUCTION OF MEMORY DEVICES
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Application No.: US18152669Application Date: 2023-01-10
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Publication No.: US20230142936A1Publication Date: 2023-05-11
- Inventor: Tsuyoshi Sendoda , Yusuke Ikawa , Nagarjuna Asam , Kei Samura , Masaaki Higashitani
- Applicant: SanDisk Technologies LLC
- Applicant Address: US TX Addison
- Assignee: SanDisk Technologies LLC
- Current Assignee: SanDisk Technologies LLC
- Current Assignee Address: US TX Addison
- Main IPC: G06T7/00
- IPC: G06T7/00 ; G06N20/20

Abstract:
To provide more test data during the manufacture of non-volatile memories and other integrated circuits, machine learning is used to generate virtual test values. Virtual test results are interpolated for one set of tests for devices on which the test is not performed based on correlations with other sets of tests. In one example, machine learning determines a correlation study between bad block values determined at die sort and photo-limited yield (PLY) values determined inline during processing. The correlation can be applied to interpolate virtual inline PLY data for all of the memory dies, allowing for more rapid feedback on the processing parameters for manufacturing the memory dies and making the manufacturing process more efficient and accurate. In another set of embodiments, the machine learning is used to extrapolate limited metrology (e.g., critical dimension) test data to all of the memory die through interpolated virtual metrology data values.
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