Invention Application
- Patent Title: ACOUSTIC WAVE DEVICES INCLUDING HIGH DENSITY INTERDIGITATED ELECTRODES
-
Application No.: US17806365Application Date: 2022-06-10
-
Publication No.: US20220407496A1Publication Date: 2022-12-22
- Inventor: Michael David Hill , Benjamin Paul Abbott , Yosuke Hamaoka , Hiroyuki Nakamura , Alan Sangone Chen
- Applicant: SKYWORKS SOLUTIONS, INC.
- Applicant Address: US CA Irvine
- Assignee: SKYWORKS SOLUTIONS, INC.
- Current Assignee: SKYWORKS SOLUTIONS, INC.
- Current Assignee Address: US CA Irvine
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/25 ; H03H9/145 ; H03H9/64
Abstract:
A acoustic wave resonator comprises a piezoelectric substrate and a plurality of interdigital transducer (IDT) electrodes disposed on the piezoelectric substrate, the plurality of IDT electrodes formed of a mixture of tungsten and chromium to provide for reduction in size and increase in quality factor of the acoustic wave resonator.
Information query
