Invention Application
- Patent Title: APPARATUS FOR CLEANING A BOWL AND A PHOTORESIST (PR) COATING SYSTEM INCLUDING THE SAME
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Application No.: US17570262Application Date: 2022-01-06
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Publication No.: US20220388043A1Publication Date: 2022-12-08
- Inventor: KYOUNGWHAN OH , Jubong LEE , ANSOOK SUL
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Priority: KR10-2021-0073452 20210607
- Main IPC: B08B9/087
- IPC: B08B9/087 ; G03F7/16 ; B08B3/08

Abstract:
An apparatus for cleaning a bowl includes a base plate, and a blade coupled to the base plate. The blade extends in a curve on a surface of the base plate in a direction receding from a center of the base plate in a plan view. An inner side surface of the blade includes a curved surface concavely recessed toward an inside of the blade in a cross-sectional view taken along a direction perpendicular to an extending direction of the blade.
Public/Granted literature
- US3095189A Spring assemblies Public/Granted day:1963-06-25
Information query
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