- 专利标题: HYBRID METHOD FOR FORMING SEMICONDUCTOR INTERCONNECT STRUCTURE
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申请号: US17873590申请日: 2022-07-26
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公开(公告)号: US20220367346A1公开(公告)日: 2022-11-17
- 发明人: Shih-Kang Fu , Ming-Han Lee , Shau-Lin Shue
- 申请人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsinchu
- 主分类号: H01L23/522
- IPC分类号: H01L23/522 ; H01L23/528 ; H01L23/532 ; H01L27/088 ; H01L21/8234 ; H01L21/768
摘要:
The present disclosure provides a semiconductor device that includes a substrate, a first dielectric layer over the substrate, and an interconnect layer over the first dielectric layer. The interconnect layer includes a plurality of metal lines and a second dielectric layer filling space between the plurality of metal lines. The plurality of metal lines includes a first metal line having a first bulk metal layer of a noble metal and a second metal line having a second bulk metal layer of a non-noble metal.
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