- 专利标题: PACKAGE STRUCTURE AND MANUFACTURING METHOD THEREOF
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申请号: US17876541申请日: 2022-07-29
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公开(公告)号: US20220367338A1公开(公告)日: 2022-11-17
- 发明人: Wei-Yu Chen , Chih-Hua Chen , Ching-Hua Hsieh , Hsiu-Jen Lin , Yu-Chih Huang , Yu-Peng Tsai , Chia-Shen Cheng , Chih-Chiang Tsao , Jen-Jui Yu
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsinchu
- 主分类号: H01L23/528
- IPC分类号: H01L23/528 ; H01L23/00 ; H01L21/56 ; H01L21/48 ; H01L23/522 ; H01L23/31 ; H01L23/538 ; H01L21/683
摘要:
A package structure includes an insulating encapsulation, at least one die, and conductive structures. The at least one die is encapsulated in the insulating encapsulation. The conductive structures are located aside of the at least one die and surrounded by the insulating encapsulation, and at least one of the conductive structures is electrically connected to the at least one die. Each of the conductive structures has a first surface, a second surface opposite to the first surface and a slant sidewall connecting the first surface and the second surface, and each of the conductive structures has a top diameter greater than a bottom diameter thereof, and wherein each of the conductive structures has a plurality of pores distributed therein.
公开/授权文献
- US11830781B2 Package structure and manufacturing method thereof 公开/授权日:2023-11-28
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