Invention Application
- Patent Title: RETICLE RETAINING SYSTEM
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Application No.: US17868880Application Date: 2022-07-20
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Publication No.: US20220351998A1Publication Date: 2022-11-03
- Inventor: SHU-HUNG LIN , CHIA-HO CHUANG , MING-CHIEN CHIU , HSIN-MIN HSUEH
- Applicant: GUDENG PRECISION INDUSTRIAL CO., LTD
- Applicant Address: TW NEW TAIPEI
- Assignee: GUDENG PRECISION INDUSTRIAL CO., LTD
- Current Assignee: GUDENG PRECISION INDUSTRIAL CO., LTD
- Current Assignee Address: TW NEW TAIPEI
- Main IPC: H01L21/673
- IPC: H01L21/673 ; G03F1/66 ; H01L21/67

Abstract:
The instant disclosure discloses a reticle retaining system comprising an inner pod and an outer pod. The inner pod is configured to receive a reticle that includes a first identification feature. The inner pod comprises an inner base having a reticle accommodating region generally at a geometric center thereof and surrounded by a periphery region, and an inner cover configured to establish sealing engagement with the inner base. The inner base has a first observable zone defined in the reticle accommodating region correspondingly arranged to allow observation of the first identification feature. The outer pod is configured to receive the inner base. The outer pod comprises an outer base having a second observable zone defined thereon observably aligned to the first observable zone of the inner pod upon receiving the inner pod, and an outer cover configured to engage the outer base and cover the inner pod.
Information query
IPC分类: