- 专利标题: SEMICONDUCTOR DIE PACKAGE WITH THERMAL MANAGEMENT FEATURES AND METHOD FOR FORMING THE SAME
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申请号: US17230112申请日: 2021-04-14
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公开(公告)号: US20220336318A1公开(公告)日: 2022-10-20
- 发明人: Yu-Sheng LIN , Po-Yao LIN , Shu-Shen YEH , Chin-Hua WANG , Shin-Puu JENG
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsinchu
- 主分类号: H01L23/367
- IPC分类号: H01L23/367 ; H01L23/373 ; H01L23/31
摘要:
A semiconductor die package and a method of forming the same are provided. The semiconductor die package includes a package substrate, and a first semiconductor die and a second semiconductor die disposed thereon. A ring structure is attached to the package substrate and surrounds the semiconductor dies. A lid structure is attached to the ring structure and disposed over the semiconductor dies, and has an opening exposing the second semiconductor die. A heat sink is disposed over the lid structure and has a portion extending into the opening of the lid structure. A first thermal interface material (TIM) layer is interposed between the lid structure and the first semiconductor die. A second TIM layer is interposed between the extending portion of the heat sink and the second semiconductor die. The first TIM layer has a thermal conductivity higher than the thermal conductivity of the second TIM layer.
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