Invention Application
- Patent Title: Metrology Method and Method for Training a Data Structure for Use in Metrology
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Application No.: US17618306Application Date: 2020-05-08
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Publication No.: US20220309645A1Publication Date: 2022-09-29
- Inventor: Vasco Tomas TENNER , Willem Marie Julia Marcel COENE
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Priority: EP19179972.5 20190613
- International Application: PCT/EP2020/062803 WO 20200508
- Main IPC: G06T7/00
- IPC: G06T7/00 ; G01N21/88 ; G01N21/956 ; G03F7/20

Abstract:
Disclosed is a method of determining a complex-valued field relating to a structure, comprising: obtaining image data relating to a series of images of the structure, for which at least one measurement parameter is varied over the series and obtaining a trained network operable to map a series of images to a corresponding complex-valued field. The method comprises inputting the image data into said trained network and non-iteratively determining the complex-valued field relating to the structure as the output of the trained network. A method of training the trained network is also disclosed.
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