Invention Application
- Patent Title: COMPOSITION FOR AVOIDING PATTERN COLLAPSE WHEN TREATING PATTERNED MATERIALS WITH LINE-SPACE DIMENSIONS OF 50 NM OR BELOW COMPRISING A BORON-TYPE ADDITIVE
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Application No.: US17603250Application Date: 2020-04-03
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Publication No.: US20220187712A1Publication Date: 2022-06-16
- Inventor: Szilard Csihony , Daniel Loeffler , Marcel Brill , Frank Pirrung , Lothar Engelbrecht , Maike Bergeler , Paatrick Wilke , Yeni Burk , Volodymyr Boyko
- Applicant: BASF SE
- Applicant Address: DE Ludwigshafen am Rhein
- Assignee: BASF SE
- Current Assignee: BASF SE
- Current Assignee Address: DE Ludwigshafen am Rhein
- Priority: EP19169513.9 20190416
- International Application: PCT/EP2020/059580 WO 20200403
- Main IPC: G03F7/40
- IPC: G03F7/40 ; C11D11/00 ; C11D7/50 ; C11D7/26 ; H01L21/02
Abstract:
Described herein is a non-aqueous composition including (a) an organic solvent, and (b) at least one additive of formulae I, where R1, R2, R3, and R4 are independently selected from C1 to C10 alkyl, C1 to C11 alkylcarbonyl, C6 to C12 aryl, C7 to C14 alkylaryl, and C7 to C14 arylalkyl; and n is 0 or 1.
Information query
IPC分类:
