Invention Application
- Patent Title: SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
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Application No.: US17106214Application Date: 2020-11-30
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Publication No.: US20220140002A1Publication Date: 2022-05-05
- Inventor: Da-Jun Lin , Yi-An Shih , Bin-Siang Tsai , Fu-Yu Tsai
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu City
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu City
- Priority: CN202011203268.7 20201102
- Main IPC: H01L27/22
- IPC: H01L27/22 ; H01L43/12 ; H01L43/02

Abstract:
A method for fabricating a semiconductor device includes the steps of first forming a magnetic tunneling junction (MTJ) on a substrate, forming a top electrode on the MTJ, forming an inter-metal dielectric (IMD) layer around the top electrode and the MTJ, forming a landing layer on the IMD layer and the MTJ, and then patterning the landing layer to form a landing pad. Preferably, the landing pad is disposed on the top electrode and the IMD layer adjacent to one side of the top electrode.
Public/Granted literature
- US11723215B2 Semiconductor device and method for fabricating the same Public/Granted day:2023-08-08
Information query
IPC分类: