- 专利标题： CRYSTAL PULLING SYSTEMS HAVING A COVER MEMBER FOR COVERING THE SILICON CHARGE AND METHODS FOR GROWING A MELT OF SILICON IN A CRUCIBLE ASSEMBLY
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申请号： US17396370申请日： 2021-08-06
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公开(公告)号： US20220064816A1公开(公告)日： 2022-03-03
- 发明人: Paolo Tosi , Matteo Pannocchia , Roberto Scala
- 申请人： GlobalWafers Co., Ltd.
- 申请人地址： TW Hsinchu
- 专利权人： GlobalWafers Co., Ltd.
- 当前专利权人： GlobalWafers Co., Ltd.
- 当前专利权人地址： TW Hsinchu
- 主分类号： C30B15/10
- IPC分类号： C30B15/10 ; C30B15/14 ; C30B29/06
摘要：
Crystal pulling system having a housing and a crucible assembly are disclosed. The system includes a heat shield that defines a central passage through which an ingot passes during ingot growth. A cover member is moveable within the heat shield along a pull axis. The cover member may include an insulation layer. The cover member covers at least a portion of the charge during meltdown.
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