- 专利标题: METHOD FOR TRANSFERRING GRAPHENE FILM
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申请号: US17478931申请日: 2021-09-19
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公开(公告)号: US20220002156A1公开(公告)日: 2022-01-06
- 发明人: Mingsheng Xu , Han Xiao
- 申请人: ZHEJIANG UNIVERSITY
- 申请人地址: CN Hangzhou
- 专利权人: ZHEJIANG UNIVERSITY
- 当前专利权人: ZHEJIANG UNIVERSITY
- 当前专利权人地址: CN Hangzhou
- 优先权: CN202010088334.4 20200212
- 主分类号: C01B32/182
- IPC分类号: C01B32/182 ; B05D1/00 ; B05D3/10 ; H01L31/18 ; C23F1/18 ; C23F1/30
摘要:
A method for transferring a graphene film is provided. The method includes spin-coating a cera alba containing solution onto a surface of the graphene film on a metal substrate to form a cera alba layer as a supporting layer, so as to obtain a first stack having the cera alba layer, the graphene film and the metal substrate in sequence; removing the metal substrate with an etching solution to obtain a second stack having the cera alba layer and the graphene film, transferring the second stack onto a target substrate to obtain a third stack having the second stack and the target substrate, and drying the third stack; removing the cera alba layer with an organic solvent. By using natural non-toxic harmless cera alba as a supporting material, it is possible to obtain the graphene film with a clean and intact surface and low sheet resistance.
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