- 专利标题: VERTICAL METAL OXIDE SEMICONDUCTOR CHANNEL SELECTOR TRANSISTOR AND METHODS OF FORMING THE SAME
-
申请号: US16909109申请日: 2020-06-23
-
公开(公告)号: US20210399051A1公开(公告)日: 2021-12-23
- 发明人: Yong-Jie WU , Yen-Chung HO , Pin-Cheng HSU , Mauricio MANFRINI , Chung-Te LIN
- 申请人: Taiwan Semiconductor Manufacturing Company Limited
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Company Limited
- 当前专利权人: Taiwan Semiconductor Manufacturing Company Limited
- 当前专利权人地址: TW Hsinchu
- 主分类号: H01L27/24
- IPC分类号: H01L27/24 ; H01L45/00 ; H01L29/786 ; H01L29/66 ; H01L27/11507 ; H01L27/11509
摘要:
A device structure includes at least one selector device. Each selector device includes a vertical stack including, from bottom to top, a bottom electrode, a metal oxide semiconductor channel layer, and a top electrode and located over a substrate, a gate dielectric layer contacting sidewalls of the bottom electrode, the metal oxide semiconductor channel layer, and the top electrode, and a gate electrode formed within the gate dielectric layer and having a top surface that is coplanar with a top surface of the top electrode. Each top electrode or each bottom electrode of the at least one selector device may be contacted by a respective nonvolatile memory element to provide a one-selector one-resistor memory cell.
公开/授权文献
信息查询
IPC分类: