- 专利标题: MEMORY CELL DEVICE WITH THIN-FILM TRANSISTOR SELECTOR AND METHODS FOR FORMING THE SAME
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申请号: US17227541申请日: 2021-04-12
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公开(公告)号: US20210399046A1公开(公告)日: 2021-12-23
- 发明人: Yong-Jie WU , Yen-Chung HO , Hui-Hsien WEI , Chia-Jung YU , Pin-Cheng HSU , Mauricio MANFRINI , Chung-Te LIN
- 申请人: Taiwan Semiconductor Manufacturing Company Limited
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Company Limited
- 当前专利权人: Taiwan Semiconductor Manufacturing Company Limited
- 当前专利权人地址: TW Hsinchu
- 主分类号: H01L27/22
- IPC分类号: H01L27/22 ; H01L43/02 ; H01L43/12 ; H01L29/24 ; H01L29/423 ; H01L29/786 ; H01L21/02 ; H01L29/66
摘要:
A memory structure, device, and method of making the same, the memory structure including a surrounding gate thin film transistor (TFT) and a memory cell stacked on the GAA transistor. The GAA transistor includes: a channel comprising a semiconductor material; a source electrode electrically connected to a first end of the channel; a drain electrode electrically connected to an opposing second end of the channel; a high-k dielectric layer surrounding the channel; and a gate electrode surrounding the high-k dielectric layer. The memory cell includes a first electrode that is electrically connected to the drain electrode.
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