Invention Application
- Patent Title: Materials and Methods for Passivation of Metal-Plated Through Glass Vias
-
Application No.: US16897788Application Date: 2020-06-10
-
Publication No.: US20210391228A1Publication Date: 2021-12-16
- Inventor: Jaeseok Jeon , Christopher F. Keimel , Chris Nassar , Andrew Minnick
- Applicant: Menlo Microsystems, Inc.
- Applicant Address: US CA Irvine
- Assignee: Menlo Microsystems, Inc.
- Current Assignee: Menlo Microsystems, Inc.
- Current Assignee Address: US CA Irvine
- Main IPC: H01L23/15
- IPC: H01L23/15 ; H01L23/29 ; C23C16/455 ; C23C16/40

Abstract:
A through-glass via (TGV) formed in a glass substrate may comprise a metal plating layer formed in the TGV. The TGV may have a three-dimensional (3D) topology through the glass substrate and the metal plating layer conformally covering the 3D topology. The TGV may further comprise a barrier layer disposed over the metal plating layer, and a metallization layer disposed over the barrier layer. The metallization layer may be electrically coupled to the metal plating layer through the barrier layer. The barrier layer may comprise a metal-nitride film disposed on the metal plating layer that is electrically coupled to the metallization layer. The barrier layer may comprise a metal film disposed over the metal plating layer and over a portion of glass surrounding the TGV, and an electrically-insulating film disposed upon the metal film, the electrically-insulating film completely overlapping the metal plating layer and partially overlapping the metal film.
Public/Granted literature
- US11676872B2 Materials and methods for passivation of metal-plated through glass vias Public/Granted day:2023-06-13
Information query
IPC分类: