- 专利标题: PRECISE PLASMA CONTROL SYSTEM
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申请号: US17234773申请日: 2021-04-19
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公开(公告)号: US20210249227A1公开(公告)日: 2021-08-12
- 发明人: Christopher Bowman , Timothy Ziemba , Kenneth Miller , Kevin Muggli , Eric Hanson , James Prager
- 申请人: Eagle Harbor Technologies, Inc.
- 申请人地址: US WA Seattle
- 专利权人: Eagle Harbor Technologies, Inc.
- 当前专利权人: Eagle Harbor Technologies, Inc.
- 当前专利权人地址: US WA Seattle
- 主分类号: H01J37/32
- IPC分类号: H01J37/32 ; H02M3/335 ; H01F19/08
摘要:
Some embodiments include a pulsing power supply comprising a power supply and a transformer comprising: a transformer core; a primary winding wrapped around a portion of the transformer core, the primary winding having a first lead and a second lead; and a secondary winding wrapped around a portion of the transformer core. The pulsing power supply may also include a first switch electrically connected with the first lead of the primary winding and the power supply; and a second switch electrically connected with the second lead of the primary winding and the power supply, wherein the first switch and the second switch are opened and closed at different time intervals. The pulsing power supply may also include a pulsing output electrically coupled with the secondary winding of the transformer that outputs pulses having a voltage greater than about 2 kV and with pulse frequencies greater than 1 kHz.
公开/授权文献
- US11532457B2 Precise plasma control system 公开/授权日:2022-12-20
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