A method of forming a high purity granular material, such as silicon carbide powder. Precursors are added to a reactor; at least part of a fiber is formed in the reactor from the precursors using chemical deposition interacting with said precursors; and the granular material is then formed from the fiber. In one aspect, the chemical deposition may include laser induced chemical vapor deposition. The granular material may be formed by grinding or milling the fiber into the granular material, e.g., ball milling the fiber. In one example, silicon carbide powder having greater than 90% beta crystalline phase purity and less than 0.25% oxygen contamination can be obtained.