- 专利标题: SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
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申请号: US16732359申请日: 2020-01-02
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公开(公告)号: US20210167281A1公开(公告)日: 2021-06-03
- 发明人: Hui-Lin Wang , Po-Kai Hsu , Hung-Yueh Chen , Yu-Ping Wang
- 申请人: UNITED MICROELECTRONICS CORP.
- 申请人地址: TW Hsin-Chu City
- 专利权人: UNITED MICROELECTRONICS CORP.
- 当前专利权人: UNITED MICROELECTRONICS CORP.
- 当前专利权人地址: TW Hsin-Chu City
- 优先权: TW108144115 20191203
- 主分类号: H01L43/12
- IPC分类号: H01L43/12 ; H01L43/02
摘要:
A method for fabricating semiconductor device includes the steps of: forming a magnetic tunneling junction (MTJ) stack on a substrate; forming a top electrode on the MTJ stack; performing a first patterning process to remove the MTJ stack for forming a first MTJ; forming a first inter-metal dielectric (IMD) layer around the first MTJ; and performing a second patterning process to remove the first MTJ for forming a second MTJ and a third MTJ.
公开/授权文献
- US11355700B2 Semiconductor device and method for fabricating the same 公开/授权日:2022-06-07
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