- 专利标题: SEMICONDUCTOR DEVICE AND HIGH-FREQUENCY MODULE
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申请号: US16943243申请日: 2020-07-30
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公开(公告)号: US20210035922A1公开(公告)日: 2021-02-04
- 发明人: Hiroaki TOKUYA , Masahiro SHIBATA , Akihiko OZAKI , Satoshi GOTO , Fumio HARIMA , Atsushi KUROKAWA
- 申请人: Murata Manufacturing Co., Ltd.
- 申请人地址: JP Kyoto-fu
- 专利权人: Murata Manufacturing Co., Ltd.
- 当前专利权人: Murata Manufacturing Co., Ltd.
- 当前专利权人地址: JP Kyoto-fu
- 优先权: JP2019-141341 20190731,JP2020-074812 20200420
- 主分类号: H01L23/00
- IPC分类号: H01L23/00 ; H01L29/737 ; H01L27/082 ; H01L23/498 ; H01L23/66
摘要:
At least one unit transistor is arranged over a substrate. A first wiring as a path of current that flows to each unit transistor is arranged over the at least one unit transistor. An inorganic insulation film is arranged over the first wiring. At least one first opening overlapping a partial region of the first wiring in a plan view is provided in the inorganic insulation film. An organic insulation film is arranged over the inorganic insulation film. A second wiring coupled to the first wiring through the first opening is arranged over the organic insulation film and the inorganic insulation film. In a plan view, a region in which the organic insulation film is not arranged is provided outside a region in which the first wiring is arranged. The second wiring is in contact with the inorganic insulation film outside the region in which the first wiring is arranged.
公开/授权文献
- US11469187B2 Semiconductor device and high-frequency module 公开/授权日:2022-10-11
信息查询
IPC分类: