- 专利标题： METHODS AND APPARATUS FOR MICROWAVE PROCESSING OF POLYMER MATERIALS
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申请号： US16919736申请日： 2020-07-02
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公开(公告)号： US20210001520A1公开(公告)日： 2021-01-07
- 发明人: Tuck Foong KOH , Chien-Kang HSIUNG , Yueh Sheng OW , Felix DENG , Yue CUI , Nuno Yen-Chu CHEN , Ananthkrishna JUPUDI , Clinton GOH , Vinodh RAMACHANDRAN
- 申请人： APPLIED MATERIALS, INC.
- 申请人地址： US CA Santa Clara
- 专利权人： APPLIED MATERIALS, INC.
- 当前专利权人： APPLIED MATERIALS, INC.
- 当前专利权人地址： US CA Santa Clara
- 主分类号： B29C35/08
- IPC分类号： B29C35/08 ; H05B6/80 ; H05B6/70 ; H05B6/68
摘要：
Methods and apparatus for curing a substrate or polymer using variable microwave frequency are provided herein. In some embodiments, a method of curing a substrate or polymer using variable microwave frequency includes: contacting a substrate or polymer with a plurality of predetermined discontinuous microwave energy bandwidths or a plurality of predetermined discontinuous microwave energy frequencies to cure the substrate or polymer.
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