Invention Application
- Patent Title: SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
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Application No.: US16438480Application Date: 2019-06-12
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Publication No.: US20200373478A1Publication Date: 2020-11-26
- Inventor: Hui-Lin Wang , Chen-Yi Weng , Yi-Wei Tseng , Chin-Yang Hsieh , Jing-Yin Jhang , Yi-Hui Lee , Ying-Cheng Liu , Yi-An Shih , I-Ming Tseng , Yu-Ping Wang
- Applicant: UNITED MICROELECTRONICS CORP.
- Priority: CN201910418706.2 20190520
- Main IPC: H01L43/02
- IPC: H01L43/02 ; H01L43/12

Abstract:
A method for fabricating semiconductor device includes the steps of: forming a first magnetic tunneling junction (MTJ) on a substrate; forming a first liner on the MTJ; forming a second liner on the first liner; forming an inter-metal dielectric (IMD) layer on the MTJ, and forming a metal interconnection in the IMD layer, the second liner, and the first liner to electrically connect the MTJ. Preferably, the first liner and the second liner are made of different materials.
Public/Granted literature
- US11063206B2 Semiconductor device and method for fabricating the same Public/Granted day:2021-07-13
Information query
IPC分类: