Invention Application
- Patent Title: PHOTOELECTRIC CONVERSION APPARATUS, EQUIPMENT INCLUDING PHOTOELECTRIC CONVERSION APPARATUS, AND MANUFACTURING METHOD OF PHOTOELECTRIC CONVERSION APPARATUS
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Application No.: US16840208Application Date: 2020-04-03
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Publication No.: US20200235157A1Publication Date: 2020-07-23
- Inventor: Shinji Kodaira , Takehito Okabe , Mitsuhiro Yomori , Nobuyuki Endo , Tomoyuki Tezuka , Toshihiro Shoyama , Jun Iwata
- Applicant: CANON KABUSHIKI KAISHA
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@4e019fed
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H04N5/369
Abstract:
A photoelectric conversion apparatus includes a semiconductor substrate including a photoelectric conversion portion, a metal containing portion provided on the semiconductor substrate, an interlayer insulation film arranged on the semiconductor substrate to cover the metal containing portion, a first silicon nitride layer arranged on the photoelectric conversion portion to include a portion lying between the interlayer insulation film and the semiconductor substrate, a silicon oxide film including a portion arranged between the first silicon nitride layer and the photoelectric conversion portion, and a portion arranged between the interlayer insulation film and the metal containing portion, a second silicon nitride layer arranged between the silicon oxide film and the metal containing portion.
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Information query
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