发明申请
- 专利标题: LASER CRYSTALLIZING APPARATUS AND METHOD OF MANUFACTURING DISPLAY APPARATUS
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申请号: US16698842申请日: 2019-11-27
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公开(公告)号: US20200171600A1公开(公告)日: 2020-06-04
- 发明人: Dong-Sung LEE , Dong-min LEE , Jongoh SEO , Byung Soo SO
- 申请人: Samsung Display Co., Ltd.
- 优先权: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@75e718c7
- 主分类号: B23K26/04
- IPC分类号: B23K26/04 ; B23K26/0622 ; H01L21/20 ; H01L21/02
摘要:
A laser crystallizing apparatus may include a laser light source, an optical system, and an optical module. The laser light source may generate a laser beam. The optical system may convert the laser beam into a line laser beam. The optical module may disperse energy of the line laser beam in a first direction for generating a dispersed line laser beam. The first direction may be perpendicular to a lengthwise direction of the optical module.
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