- 专利标题: GAS DISTRIBUTOR AND FLOW VERIFIER
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申请号: US16040326申请日: 2018-07-19
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公开(公告)号: US20200027702A1公开(公告)日: 2020-01-23
- 发明人: Mark Taskar , Iqbal A. Shareef
- 申请人: Lam Research Corporation
- 主分类号: H01J37/32
- IPC分类号: H01J37/32
摘要:
Apparatus and methods for distributing and mixing gas are provided. In one example, a gas distributor comprises a body, a gas inlet for admitting gas to the body, an orbital array of gas outlets for distributing the gas to an external component, and a central gas distribution point disposed within the body at a center of the orbital array of gas outlets and in fluid communication with the orbital array of gas outlets.
公开/授权文献
- US10943769B2 Gas distributor and flow verifier 公开/授权日:2021-03-09
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