• Patent Title: MICROMECHANICAL COMPONENT FOR A PRESSURE SENSOR DEVICE
  • Application No.: US16302467
    Application Date: 2017-05-10
  • Publication No.: US20190277717A1
    Publication Date: 2019-09-12
  • Inventor: Jochen REINMUTH
  • Applicant: Robert Bosch GmbH
  • Priority: DE102016209241.3 20160527
  • International Application: PCT/EP2017/061176 WO 20170510
  • Main IPC: G01L9/00
  • IPC: G01L9/00
MICROMECHANICAL COMPONENT FOR A PRESSURE SENSOR DEVICE
Abstract:
A micromechanical component for a pressure sensor device, including a diaphragm, which separates a reference pressure from an external pressure, at least one first stator electrode, at least one second stator electrode, and a rocker-arm structure, which is tiltable about an axis of rotation and has at least one first actuator electrode and at least one second actuator electrode; the rocker-arm structure being joined to the diaphragm so that when the external pressure and the reference pressure are equal, the rocker-arm structure and its actuator electrodes are present in their starting positions; if the rocker-arm structure and its actuator electrodes are in their starting positions, a first capacitance between the at least one first actuator electrode and the at least one first stator electrode differing from a second capacitance between the at least one second actuator electrode and the at least one second stator electrode.
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