Invention Application
- Patent Title: CRYSTAL PULLING SYSTEMS AND METHODS FOR PRODUCING MONOCRYSTALLINE INGOTS WITH REDUCED EDGE BAND DEFECTS
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Application No.: US16237071Application Date: 2018-12-31
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Publication No.: US20190136408A1Publication Date: 2019-05-09
- Inventor: Soubir Basak , Gaurab Samanta , Parthiv Daggolu , Benjamin Michael Meyer , William L. Luter , Jae Woo Ryu , Eric Michael Gitlin
- Applicant: GlobalWafers Co., Ltd
- Main IPC: C30B15/20
- IPC: C30B15/20 ; C30B29/06 ; C30B15/14

Abstract:
A crystal pulling system for growing a monocrystalline ingot from a melt of semiconductor or solar-grade material includes a crucible for containing the melt of material, a pulling mechanism configured to pull the ingot from the melt along a pull axis, and a multi-stage heat exchanger defining a central passage for receiving the ingot as the ingot is pulled by the pulling mechanism. The heat exchanger defines a plurality of cooling zones arranged vertically along the pull axis of the crystal pulling system. The plurality of cooling zones includes two enhanced-rate cooling zones and a reduced-rate cooling zone disposed vertically between the two enhanced-rate cooling zones.
Public/Granted literature
- US11072870B2 Crystal pulling systems and methods for producing monocrystalline ingots with reduced edge band defects Public/Granted day:2021-07-27
Information query
IPC分类: